Processing method and processing apparatus
Number of patents in Portfolio can not be more than 2000
United States of America Patent
Stats
-
Jan 9, 2018
Issued Date -
N/A
app pub date -
Oct 31, 2013
filing date -
Nov 7, 2012
priority date (Note) -
In Force
status (Latency Note)
Importance
Abstract
A method of processing an object to by using a processing apparatus is provided. The apparatus includes a plurality of containers to contain the object, a plurality of process chambers to perform a desired process on the object, a temporary storage chamber to temporarily store the object, and a transfer device to transfer the object. The method includes a first step of transferring an unprocessed object from the containers to the process chambers, and a second step of transferring a processed object from the process chambers to the temporary storage chamber. The method further includes a third step of collecting the processed object into one of the containers starting a collection of the processed object from the temporary storage chamber depending on a timing of processing a last object of the one of the containers prior to collecting the processed object into the other containers from the temporary storage chamber.
First Claim
Other Claims data not available
Family
International Classification(s)
- 2013 Application Filing Year
- H01L Class
- 22267 Applications Filed
- 20713 Patents Issued To-Date
- 93.03 % Issued To-Date
Cited Art Landscape
Patent Citation Ranking
- 0 Citation Count
- H01L Class
- 0 % this patent is cited more than
- 7 Age
Maintenance Fees
| Fee | Large entity fee | small entity fee | micro entity fee | due date |
|---|---|---|---|---|
| 7.5 Year Payment | $3600.00 | $1800.00 | $900.00 | Jul 9, 2025 |
| 11.5 Year Payment | $7400.00 | $3700.00 | $1850.00 | Jul 9, 2029 |
