Substrate storage container

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 9865487
APP PUB NO 20160225647A1
SERIAL NO

14917444

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ATTORNEY / AGENT: (SPONSORED)

Importance

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Abstract

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A substrate storing container that stores substrates composed of semiconductor wafers includes: a locked portion that is arranged at a center portion of an upper wall and is locked by a lifting member that can lift a container main body; in which the locked portion includes a plate-like flange portion having a lower face that faces the upper wall and an elastically deformable elastic member provided at a lower face of the flange portion and/or at a rim portion of the flange portion; and in which the locked portion is locked by the lifting member in a state in which the elastic member is sandwiched between the flange portion and the lifting member.

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First Claim

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Patent Owner(s)

Patent OwnerAddress
MIRAIAL CO LTD24-1 HIGASHI-IKEBUKURO 1-CHOME TOSHIMA-KU TOKYO 1700013 ?1700013

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Nagashima, Tsuyoshi Tokyo, JP 26 121
Oyama, Takaharu Tokyo, JP 12 75

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