Sensor system for lithography
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United States of America Patent
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Jan 9, 2018
Issued Date -
N/A
app pub date -
Apr 12, 2017
filing date -
Oct 17, 2012
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Abstract
A sensor system to measure a physical quantity, the system including a parallel detection arrangement with multiple detectors to allow measurements in parallel at different spatial locations, wherein the multiple detectors share a noise source, wherein the sensor system is configured such that the multiple detectors each output a signal as a function of the physical quantity, and wherein the sensor system is configured such that at least one detector responds differently to noise originating from the shared noise source than the one or more other detectors.
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