Imprint lithography

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United States of America Patent

PATENT NO 9864279
SERIAL NO

13812844

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Abstract

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An imprint lithography apparatus having a first frame to be mounted on a floor, a second frame mounted on the first frame via a kinematic coupling, an alignment sensor mounted on the second frame, to align an imprint lithography template arrangement with a target portion of a substrate, and a position sensor to measure a position of the imprint lithography template arrangement and/or a substrate stage relative to the second frame.

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Patent Owner(s)

Patent OwnerAddress
ASML NETHERLANDS B VP O BOX 324 VELDHOVEN 5500 AH

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
De, Fockert George Arie Jan Apeldoorn, NL 9 210
De, Schiffart Catharinus Nijmegen, NL 10 62
Dijksman, Johan Frederik Weert, NL 85 1289
Hardeman, Toon 's-Hertogenbosch, NL 17 59
Jansen, Norbert Erwin Therenzo Eindhoven, NL 11 49
Jeunink, Andre Bernardus Bergeijk, NL 59 540
Kruijt-Stegeman, Yvonne Wendela Eindhoven, NL 60 572
Renkens, Michael Jozef Mathijs Sittard, NL 20 299
Van, Baars Gregor Edward Eindhoven, NL 7 55
Van, Schothorst Gerard Waardenburg, NL 14 79
Wuister, Sander Frederik Eindhoven, NL 98 1240

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