Reflective mirror, projection optical system, exposure apparatus, and device manufacturing method

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United States of America Patent

PATENT NO 9864278
SERIAL NO

15437338

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Importance

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Abstract

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A reflective mirror is provided with a base and a multilayer film including a first layer and a second layer laminated alternately on the base and capable of reflecting at least a portion of incident light. The multilayer film is provided with a first portion having a first thickness, and with a second portion having a second thickness that is different from the first thickness, and which is provided at a position rotationally symmetric to that of the first portion about an optical axis of the reflective mirror.

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Patent Owner(s)

Patent OwnerAddress
NIKON CORPORATION1-5-20 NISHIOI SHINAGAWA-KU TOKYO 140-8601

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Chiba, Hiroshi Ageo, JP 119 1658
Kawabe, Yoshio Kumagaya, JP 25 59

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