High order focus in laser radar tooling ball measurements

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United States of America Patent

PATENT NO 9864204
SERIAL NO

15048963

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Abstract

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Interrogation optical beams are focused or otherwise shaped for delivery to a target that includes one or more tooling balls so as to have a beam radius of curvature corresponding to a tooling ball radius. Focus values can be stored in a look-up table and can include two beam focus conditions that produce a selected beam focus. The two beam focus conditions are associated with a common beam curvature. The focus conditions are associated with beam curvatures within and without a Rayleigh range from a beam waist.

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Patent Owner(s)

Patent OwnerAddress
NIKON CORPORATION1-5-20 NISHIOI SHINAGAWA-KU TOKYO 140-8601

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Smith, Daniel Gene Tucson, US 58 195

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