Micromechanical structure with biaxial actuation and corresponding MEMS device
Number of patents in Portfolio can not be more than 2000
United States of America Patent
Stats
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Jan 9, 2018
Issued Date -
N/A
app pub date -
May 24, 2016
filing date -
Nov 30, 2015
priority date (Note) -
In Force
status (Latency Note)
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Abstract
A reflector micromechanical structure includes a frame with a window. The frame is elastically connected to an anchorage structure by first elastic elements. An actuation structure operatively coupled to the frame is configured to generate a first actuation movement of the frame about a first actuation axis. A mobile mass is positioned within the window and elastically coupled to the frame by second elastic elements. A mass distribution is associated to the mobile mass such as to generate, by an inertial effect in response to the first actuation movement, a second actuation movement of rotation of the mobile mass about a second actuation axis.
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Family

- 15 United States
- 10 France
- 8 Japan
- 7 China
- 5 Korea
- 2 Other
Patent Owner(s)
Patent Owner | Address | |
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STMICROELECTRONICS S R L | 20864 AGRATE BRIANZA (MB) |
International Classification(s)

- 2016 Application Filing Year
- G02B Class
- 10130 Applications Filed
- 7990 Patents Issued To-Date
- 78.88 % Issued To-Date
Inventor(s)
Inventor Name | Address | # of filed Patents | Total Citations |
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Carminati, Roberto | Piancogno, IT | 67 | 148 |
# of filed Patents : 67 Total Citations : 148 |
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- 0 Citation Count
- G02B Class
- 0 % this patent is cited more than
- 7 Age
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