Micromechanical structure with biaxial actuation and corresponding MEMS device
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United States of America Patent
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Jan 9, 2018
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app pub date -
May 24, 2016
filing date -
Nov 30, 2015
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Abstract
A reflector micromechanical structure includes a frame with a window. The frame is elastically connected to an anchorage structure by first elastic elements. An actuation structure operatively coupled to the frame is configured to generate a first actuation movement of the frame about a first actuation axis. A mobile mass is positioned within the window and elastically coupled to the frame by second elastic elements. A mass distribution is associated to the mobile mass such as to generate, by an inertial effect in response to the first actuation movement, a second actuation movement of rotation of the mobile mass about a second actuation axis.
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