Optical element with antireflection function and optical apparatus including the same
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United States of America Patent
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Jan 9, 2018
Grant Date -
Mar 15, 2012
app pub date -
Sep 12, 2011
filing date -
Sep 14, 2010
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Abstract
An optical element having antireflection function includes a substrate including a first relief structure, which includes a plurality of convexes and a plurality of concaves arrayed with a pitch of at most a half of a wavelength λ. A thin film layer including at least one thin film on the first relief structure. The at least one thin film each has a refractive index lower than a refractive index of the substrate. The optical element satisfies the following conditional expression: 1/4 ≦h1/h0≦2 and 1/5 λ≦D≦2λ, where h0 represents a first height difference between a top and a bottom of the first relief structure in a normal direction of a bottom plane of the first relief structure, h1 represents a second height difference between a top and a bottom of the second relief structure in the normal direction, D represents a maximum thickness of the thin film layer, and the wavelength λ is 550 nm.
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