Electrical contacting device
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United States of America Patent
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Jan 9, 2018
Issued Date -
N/A
app pub date -
Mar 25, 2014
filing date -
May 8, 2013
priority date (Note) -
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Abstract
An electrical contacting device for electrical physical contact with a specimen, particularly wafers, taking place in a contacting direction, with at least one conductor substrate which can be electrically connected to a testing device, at least one contact distance transformer and at least one contact head having electrical contact elements, particularly resilient contact elements, preferably serving to compensate different physical contact distances existing in the contacting direction particularly at the contact elements.
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