Importance

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Abstract

A measurement apparatus includes:

a light emitting unit that projects irradiation light to an object;a first lens that changes a divergence degree of the irradiation light;an aperture stop unit that stops down the irradiation light projected from the first lens;a second lens that condenses the irradiation light passing through the aperture stop unit and projects the irradiation light to the object in a first direction;a transmission unit that is provided in a focal plane of the second lens and transmits therethrough a part of reflected light;a first light receiving unit that includes a light receiving surface that receives the part of the reflected light transmitted through the transmission unit; anda measurement unit that measures a height of a surface of the object by using a position of the part of the reflected light on the light receiving surface.

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First Claim