Internally heated porous filter for defect reduction with liquid or solid precursors
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United States of America Patent
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Jan 9, 2018
Grant Date -
Apr 14, 2016
app pub date -
Oct 7, 2015
filing date -
Oct 8, 2014
priority date (Note) -
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Abstract
A heated filter assembly for heating gas supplied to a substrate processing system includes a housing defining a cavity, an inner surface and an outer surface. A filter element is arranged inside the cavity of the housing with an outer surface thereof in a spaced relationship relative to the inner surface of the housing. A heat transfer element is arranged inside of the filter element and includes an outer surface and an inner cavity. A plurality of projections is arranged on the outer surface of the heat transfer element in direct physical contact with an inner surface of the filter element. A plurality of portions is arranged on the outer surface of the heat transfer element, is spaced from the inner surface of the filter element and is located between the plurality of projections.
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