Apparatus for the preparation of silanes
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United States of America Patent
Stats
-
Jan 9, 2018
Issued Date -
N/A
app pub date -
Apr 7, 2017
filing date -
Apr 24, 2013
priority date (Note) -
In Force
status (Latency Note)
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Abstract
The invention relates to a process for preparing dimeric and/or trimeric silanes by conversion of monosilane in a plasma and to a plant for performance of the process.
First Claim
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International Classification(s)
Cited Art Landscape
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- 0 Citation Count
- C01B Class
- 0 % this patent is cited more than
- 7 Age
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