Method of manufacturing apparatus for harvesting and storing piezoelectric energy
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United States of America Patent
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Jan 9, 2018
Issued Date -
N/A
app pub date -
Aug 19, 2015
filing date -
Aug 30, 2011
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Abstract
A method of manufacturing an apparatus for harvesting and storing piezoelectric energy includes forming a groove at a side on a substrate. The method further includes embedding and planarizing a polymer in the groove, forming a piezoelectric energy harvesting device, which converts and stores an external vibration into electric energy, onto the substrate, and forming a piezoelectric MEMS cantilever by forming a hole at a side of the piezoelectric energy harvesting device and by removing the polymer in the groove through the hole.
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International Classification(s)
- H01L:SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICE....
- H02N:ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H01M:PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT....
- B81C:PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE M....
- B81B:MICRO-STRUCTURAL DEVICES OR SYSTEMS, e.g. MICRO-ME....
- H03H:IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONA....
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