Three dimensional nanometer filters and methods of use
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United States of America Patent
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Jan 9, 2018
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app pub date -
May 1, 2015
filing date -
May 1, 2015
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Abstract
Three dimensional nanoparticle filters are provided herein. In one embodiment a filter device includes a base material, alternating layers of sacrificial material between layers of structural material being deposited onto the base material to create a layered base material, and filter sidewalls etched into the deposited alternating layers of the layered base material to remove the layers of sacrificial material between the layers of structural material to form filter slots in the filter sidewalls as well as create channels between the filter sidewalls, where a size of the filter slots is selectable based on a thickness of the layers of sacrificial material utilized.
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