High efficiency high voltage charge pump actuator for capacitive load
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United States of America Patent
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Jan 2, 2018
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N/A
app pub date -
Nov 18, 2016
filing date -
Nov 19, 2015
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Abstract
A method for charge-reuse, the method may include performing multiple repetitions of the steps of: operating a second capacitive load while the second capacitive load is disconnected from a first capacitive load; wherein the second capacitive load is a Microelectromechanical systems (MEMS) capacitive load or a Nanoelectromechanical systems (NEMS) capacitive load; electrically coupling a first capacitive load to a second capacitive load via a path that comprises an inductor; charging the first capacitive load with a second charge provided from the second capacitive load; electrically disconnecting the first capacitive load, the second capacitive load and the inductor from each other; feeding the inductor with a supply current provided by a supply circuit; disconnecting the inductor from the supply circuit and coupling the inductor to the first capacitive load; charging the first capacitive load by the inductor; electrically coupling the first capacitive load to the second capacitive load via the path that comprises the inductor; charging the second capacitive load with a first charge provided from the first capacitive load; and operating the second capacitive load while the second capacitive load is disconnected from the first capacitive load.
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