Semiconductor device comprising a transistor cell including a source contact in a trench, method for manufacturing the semiconductor device and integrated circuit

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United States of America Patent

PATENT NO 9859418
SERIAL NO

15234520

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Abstract

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A semiconductor device is provided including a transistor cell in a semiconductor substrate having a first main surface. The transistor cell includes a gate electrode in a gate trench in the first main surface adjacent to a body region. A longitudinal axis of the gate trench extends in a first direction parallel to the first main surface. A source region, a body region and a drain region are disposed along the first direction. A source contact comprises a first source contact portion and a second source contact portion. The second source contact portion is disposed at a second main surface of the semiconductor substrate. The first source contact portion includes a source conductive material in direct contact with the source region and a portion of the semiconductor substrate arranged between the source conductive material and the second source contact portion.

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Patent Owner(s)

  • INFINEON TECHNOLOGIES DRESDEN GMBH

International Classification(s)

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Gebhardt, Karl-Heinz Dresden, DE 6 20
Meiser, Andreas Sauerlach, DE 155 859
Schloesser, Till München, DE 116 1665
Weber, Detlef Ottendorf-Okrilla, DE 18 56

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