Re-distribution layer structure and manufacturing method thereof
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United States of America Patent
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Jan 2, 2018
Issued Date -
N/A
app pub date -
Mar 10, 2017
filing date -
Nov 23, 2016
priority date (Note) -
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status (Latency Note)
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Abstract
A re-distribution layer structure is adapted to be disposed on a substrate having a pad and a protective layer which has a first opening exposing a part of the pad. The re-distribution layer structure includes a first and a second patterned insulating layers and a re-distribution layer. The first patterned insulating layer is disposed on the protective layer and includes at least one trench and a second opening corresponding to the first opening. The re-distribution layer is disposed on the first patterned insulating layer and includes a pad portion and a wire portion. The pad portion is located on the first patterned insulating layer. The wire portion includes a body and at least one root protruding from the body and extending into the trench. The body extends from the pad portion to the pad exposed by the first and the second openings. The second patterned insulating layer covers the wire portion and exposes a part of the pad portion. A manufacturing method of re-distribution layer structure is further provided.
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