Desmear treatment device and desmear treatment method
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United States of America Patent
Stats
-
Jan 2, 2018
Issued Date -
N/A
app pub date -
May 22, 2015
filing date -
Jun 13, 2014
priority date (Note) -
In Force
status (Latency Note)
Importance
Abstract
The present invention has as its object the provision of a desmear treatment device and a desmear treatment method capable of reliably performing a desmear treatment with high treatment efficiency. In the desmear treatment method of the present invention, when irradiating a to-be-treated object disposed in a treatment space with vacuum ultraviolet rays via an ultraviolet transmitting window member to remove smear in the to-be-treated object, a treatment gas containing active species to be activated by the irradiation of the vacuum ultraviolet rays and having contained moisture is supplied into the treatment space. The desmear treatment device includes treatment gas supply means having a humidifying mechanism for causing a treatment gas containing active species to be activated by vacuum ultraviolet rays from an ultraviolet light source to contain moisture.
First Claim
Other Claims data not available
Family
International Classification(s)
- 2015 Application Filing Year
- H01L Class
- 25498 Applications Filed
- 22451 Patents Issued To-Date
- 88.06 % Issued To-Date
Cited Art Landscape
Patent Citation Ranking
- 0 Citation Count
- H01L Class
- 0 % this patent is cited more than
- 7 Age
Maintenance Fees
| Fee | Large entity fee | small entity fee | micro entity fee | due date |
|---|---|---|---|---|
| 7.5 Year Payment | $3600.00 | $1800.00 | $900.00 | Jul 2, 2025 |
| 11.5 Year Payment | $7400.00 | $3700.00 | $1850.00 | Jul 2, 2029 |
