Ion source

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United States of America Patent

PATENT NO 9859086
SERIAL NO

13781913

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Abstract

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According to one embodiment, there is provided an ion source. The ion source includes a vacuum-exhausted vacuum chamber, a target which is set in the vacuum chamber and generates a plurality of valences of ions by irradiation of a laser beam, an acceleration electrode which is applied with voltage in order to accelerate the ions generated by the target, and an intermediate electrode which is provided between the target and the acceleration electrode and is applied with reverse voltage of the voltage applied to the acceleration electrode.

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Patent Owner(s)

  • KABUSHIKI KAISHA TOSHIBA

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Hashimoto, Kiyoshi Yokohama, JP 81 766
Kakutani, Akiko Yokohama, JP 11 166
Kurusu, Tsutomu Tokyo, JP 9 32
Osanai, Akihiro Yokohama, JP 9 40
Sato, Kiyokazu Tokyo, JP 31 376
Yoshiyuki, Takeshi Yokohama, JP 15 56

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