Encapsulated micro-electromechanical system switch and method of manufacturing the same

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United States of America Patent

PATENT NO 9859076
SERIAL NO

14874704

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Abstract

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Encapsulated MEMS switches are disclosed along with methods of manufacturing the same. A first sacrificial layer is used to form the actuation member of the MEMS switch. A second sacrificial layer is used to form the enclosure that encapsulates the MEMS switch.

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Patent Owner(s)

Patent OwnerAddress
QORVO US INC7628 THORNDIKE ROAD GREENSBORO NC 27409

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Costa, Julio C Oak Ridge, US 101 7980
Hammond, Jonathan Hale Oak Ridge, US 32 1410

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