Measuring apparatus for three-dimensional profilometry and method thereof

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United States of America Patent

PATENT NO 9858671
SERIAL NO

14483821

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Abstract

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The present invention provides measuring apparatus and method for three-dimensional profilometry of an object, wherein a random-speckle beam and a structured fringe beam are projected onto the object and reflected therefrom for forming deformed random-speckle beam and structured fringe beams that are separately acquired by an image acquiring device thereby obtaining a random-speckle image utilized to determine an absolute phase information of each position on the surface of the object, and a structured fringe image utilized to determine a relative phase information for each position of the surface of the object. Each absolute phase information and each relative phase information corresponding to each position are converted into an absolute depth and a relative depth, respectively. Finally, the depth information of each position on the surface of the object is calculated by combining the corresponding absolute depth and the relative depth whereby the surface profile of the object can be established.

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Patent Owner(s)

Patent OwnerAddress
NATIONAL TAIWAN UNIVERSITYTAIPEI

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Chen, Liang-Chia Taipei, TW 22 264
Hsieh, Chung-An Taipei, TW 9 122
Weng, Ming-Xuan Taipei, TW 1 16

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