Substrate table, a lithographic apparatus and a device manufacturing method

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United States of America Patent

PATENT NO 9857696
SERIAL NO

15273416

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Abstract

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A table for a lithographic apparatus, the table having a catchment opening formed in an upper surface of the table, the catchment opening in fluid communication through the table with the environment of the table at a drain opening in a surface of the table other than the upper surface.

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Patent Owner(s)

Patent OwnerAddress
ASML NETHERLANDS B VP O BOX 324 VELDHOVEN 5500 AH

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Lafarre, Raymond Wilhelmus Louis Helmond, NL 93 713
Ten, Kate Nicolaas Almkerk, NL 157 972

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