Gas laser device and control method therefor

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United States of America Patent

PATENT NO 9853410
SERIAL NO

15240162

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Abstract

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A gas laser apparatus includes a chamber containing a laser gas, a pair of electrodes disposed within the chamber, a fan disposed within the chamber, a motor connected to a rotating shaft of the fan, and a rotating speed control unit configured to control a rotating speed of the fan based on a wear-out parameter of the pair of electrodes.

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Patent Owner(s)

Patent OwnerAddress
GIGAPHOTON INCTOCHIGI COUNTY JAPAN TOCHIGI

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Asayama, Takeshi Oyama, JP 25 165
Kakizaki, Kouji Oyama, JP 94 874
Tsushima, Hiroaki Oyama, JP 49 159
Wakabayashi, Osamu Oyama, JP 394 4239

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