Double diffused metal oxide semiconductor device and manufacturing method thereof

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United States of America Patent

PATENT NO 9853099
SERIAL NO

15490626

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Abstract

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The present invention provides a DMOS device and a manufacturing method thereof. The DMOS device includes: a substrate, an epitaxial layer, a high voltage well, a body region, a gate, a source, a drain, a drift buried region and a buried region. A first PN junction is formed between the high voltage well and an upper surface of the substrate. From a cross-section view, along the channel direction, a second PN junction is formed between the drift buried region and the buried region or formed between the high voltage well and the buried region. Along the channel direction, the first PN junction and the second PN junction have respective depths. The depth is defined as a distance extending from the upper face of the epitaxial layer downward along a vertical direction. The depth of the second PN junction is shallower than the depth of the first PN junction.

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Patent Owner(s)

Patent OwnerAddress
RICHTEK TECHNOLOGY CORPORATION14F-1 NO 8 TAIYUEN 1ST ST ZHUBEI CITY HSINCHU COUNTY 30288

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Chen, Chu-Feng HsinChu, TW 20 38
Huang, Tsung-Yi HsinChu, TW 142 613

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