Method and apparatus for controlling topographical variation on a milled cross-section of a structure
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United States of America Patent
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Dec 26, 2017
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app pub date -
Apr 18, 2012
filing date -
Nov 18, 2003
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Abstract
An improved method of controlling topographical variations when milling a cross-section of a structure, which can be used to reduce topographical variation on a cross-section of a write-head in order to improve the accuracy of metrology applications. Topographical variation is reduced by using a protective layer that comprises a material having mill rates at higher incidence angles that closely approximate the mill rates of the structure at those higher incidence angles. Topographical variation can be intentionally introduced by using a protective layer that comprises a material having mill rates at higher incidence angles that do not closely approximate the mill rates of the structure at those higher incidence angles.
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