Using radial basis function networks and hyper-cubes for excursion classification in semi-conductor processing equipment
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United States of America Patent
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Dec 26, 2017
Grant Date -
Jun 9, 2016
app pub date -
Feb 12, 2016
filing date -
Jan 17, 2013
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Abstract
A method and system for analysis of data, including creating a first node, determining a first hyper-cube for the first node, determining whether a sample resides within the first hyper-cube. If the sample does not reside within the first hyper-cube, the method includes determining whether the sample resides within a first hyper-sphere, wherein the first hyper-sphere has a radius equal to a diagonal of the first hyper-cube.
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