Back end of line process integrated optical device fabrication

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United States of America Patent

PATENT NO 9851506
SERIAL NO

14830046

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Abstract

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An integrated optical device fabricated in the back end of line process located within the vertical span of the metal stack and having one or more advantages over a corresponding integrated optical device fabricated in the silicon on insulator layer.

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Patent Owner(s)

Patent OwnerAddress
NOKIA SOLUTIONS AND NETWORKS OYESPOO FINLAND ESPOO SOUTHERN FINLAND

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Baehr-Jones, Thomas Wetteland Arcadia, US 59 242
Hochberg, Michael J New York, US 140 1799
Novack, Ari Jason Arcadia, US 13 142
Shi, Ruizhi New York, US 48 368

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