Electron beam device, cold field emitter, and method for regeneration of a cold field emitter

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United States of America Patent

PATENT NO 9847208
SERIAL NO

15233092

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Abstract

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The present disclosure provides an electron beam device (500) for inspecting a sample (10) with an electron beam, comprising an electron beam source comprising a cold field emitter (100) for emitting an electron beam, electron beam optics for directing and focusing the electron beam onto the sample (10), and a detector device (540) for detecting secondary charged particles generated by impingement of the electron beam on the sample (10). The cold field emitter (100) includes an emitter tip (110), a base arrangement (120) configured for supporting the emitter tip (110) and comprising a first base element (122) and a second base element (124), and a filament (130) having at least a first filament portion (132) and a second filament portion (134) attaching the emitter tip (110) to the base arrangement (120), wherein the first filament portion (132) extends between the emitter tip (110) and the first base element (122) and the second filament portion (134) extends between the emitter tip (110) and the second base element (124), wherein a length (L) of each of the first filament portion (132) and the second filament portion (134) is 4 mm or less, and wherein a diameter of a cross-section of each of the first filament portion (132) and the second filament portion (134) is 0.13 mm or less.

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Patent Owner(s)

Patent OwnerAddress
ICT INTEGRATED CIRCUIT TESTING GESELLSCHAFT FUR HALBLEITERPRUFTECHNIK MBHAMMERTHALSTR 20 HEIMSTETTEN D-85551

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Adamec, Pavel Haar, DE 53 1042

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