Fast density estimation method for defect inspection application

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United States of America Patent

PATENT NO 9846929
APP PUB NO 20170278235A1
SERIAL NO

15079062

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Abstract

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The present invention provide a high speed spatial density estimation algorithm to estimate defect density maps for blob analysis in an image processing field for inspection. The method of the present invention uses a rotated L1 epsilon-ball neighborhood mask for determining a defect density for each of target pixels to generate a defect density map for defect detection of an object. The present method is capable of providing high detection speed and substantially eliminating influence of the noise from images.

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Patent Owner(s)

Patent OwnerAddress
HONG KONG APPLIED SCIENCE AND TECHNOLOGY RESEARCH INSTITUTE COMPANY LIMITED5/F PHOTONICS CENTRE 2 SCIENCE PARK EAST AVENUE HONG KONG SCIENCE PARK SHATIN N T HONG KONG KONG

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Zou, Weiwen Hong Kong, HK 15 39

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