Light measurement apparatus, method, program and recording medium

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United States of America Patent

PATENT NO 9846120
APP PUB NO 20150241346A1
SERIAL NO

14427061

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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A light measurement apparatus includes a master laser, a slave laser, an illumination light pulse, and a signal-under-measurement generator. The master laser generates as an output a master laser light pulse, and the slave laser generates as an output a slave laser light pulse having a repetition frequency or a phase different from that of the master laser light pulse. The illumination light pulse generator receives the master laser light pulse and generates as an output an illumination light pulse, and the signal-under-measurement generator, at a point in time when receiving a light pulse under measurement obtained by illuminating the object under measurement with the illumination light pulse and further the slave laser light pulse, generates as an output a signal under measurement according to a power of the light pulse under measurement. The apparatus corrects an error in a measurement of the signal under measurement.

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Patent Owner(s)

Patent OwnerAddress
ADVANTEST CORPORATION1-6-2 MARUNOUCHI CHIYODA-KU TOKYO 100-0005

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Hashimoto, Masaichi Miyagi, JP 7 18
Irisawa, Akiyoshi Miyagi, JP 19 59

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