Vacuum heat treatment apparatus
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United States of America Patent
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Dec 19, 2017
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N/A
app pub date -
Jun 28, 2012
filing date -
Jun 28, 2011
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Abstract
A vacuum heat treatment apparatus according to the embodiment comprises a chamber; a thermal insulator in the chamber; a reaction container in the thermal insulator; a heating member between the reaction container and the the thermal insulator for heating the reaction container; and a temperature measuring member in or on a surface of the reaction container, wherein the temperature measuring member comprises a thermocouple and a protective tube surrounding the thermocouple, and the protective tube comprises tungsten (W), tantalum (Ta), or silicon carbide (SiC).
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