Process and apparatus for cleaning imprinting molds, and process for manufacturing imprinting molds
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United States of America Patent
Stats
-
Dec 19, 2017
Issued Date -
N/A
app pub date -
Dec 15, 2014
filing date -
Oct 29, 2010
priority date (Note) -
In Force
status (Latency Note)
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Abstract
The cleaning process of cleaning an imprinting mold including a release layer coupled via siloxane bonds to a substrate of that release layer includes a first cleaning step and a second cleaning step. In the first cleaning step, the angle of contact of the surface of the release layer with water is made small, and in the second cleaning step, the alkali cleaning agent is brought in contact with the release layer that has gone through the first cleaning step.
First Claim
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International Classification(s)
- 2014 Application Filing Year
- B29C Class
- 4829 Applications Filed
- 3911 Patents Issued To-Date
- 80.99 % Issued To-Date
Cited Art Landscape
Patent Citation Ranking
- 0 Citation Count
- B29C Class
- 0 % this patent is cited more than
- 8 Age
Maintenance Fees
| Fee | Large entity fee | small entity fee | micro entity fee | due date |
|---|---|---|---|---|
| 7.5 Year Payment | $3600.00 | $1800.00 | $900.00 | Jun 19, 2025 |
| 11.5 Year Payment | $7400.00 | $3700.00 | $1850.00 | Jun 19, 2029 |
