Magnetic core inductor integrated with multilevel wiring network
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United States of America Patent
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Dec 12, 2017
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app pub date -
Sep 11, 2012
filing date -
Sep 11, 2012
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Abstract
An inductor is integrated into a multilevel wiring network of a semiconductor integrated circuit. The inductor includes a planar magnetic core and a conductive winding. The conductive winding turns around in generally spiral manner on the outside of the planar magnetic core. The conductive winding is piecewise constructed of wire segments and of VIAs. The wire segments pertain to at least two wiring planes and the VIAs are interconnecting the at least two wiring planes. Methods for such integration, and for fabricating laminated planar magnetic cores are also presented.
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