Switchable filters and design structures

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United States of America Patent

PATENT NO 9843303
SERIAL NO

14755522

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Abstract

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Switchable and/or tunable filters, methods of manufacture and design structures are disclosed herein. The method of forming the filters includes forming at least one piezoelectric filter structure comprising a plurality of electrodes formed on a piezoelectric substrate. The method further includes forming a fixed electrode with a plurality of fingers on the piezoelectric substrate. The method further includes forming a moveable electrode with a plurality of fingers over the piezoelectric substrate. The method further includes forming actuators aligned with one or more of the plurality of fingers of the moveable electrode.

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Patent Owner(s)

Patent OwnerAddress
GLOBALFOUNDRIES U S INC400 STONEBREAK ROAD EXTENSION MALTA NY 12020

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Adkisson, James W Jericho, US 164 2988
Candra, Panglijen Essex Junction, US 22 209
Dunbar, Thomas J Burlington, US 25 252
Gambino, Jeffrey P Portland, US 531 7616
Jaffe, Mark D Shelburne, US 146 2358
Stamper, Anthony K Williston, US 615 6820
Wolf, Randy L Essex Junction, US 62 384

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