Robot and adaptive placement system and method
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United States of America Patent
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Dec 12, 2017
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app pub date -
Jun 4, 2014
filing date -
Jun 5, 2013
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Abstract
A method including moving a substrate, located on a first end effector of a robot, from a first location towards a second location by the robot; determining location of a fiducial on the substrate while the substrate is being moved from the first location towards the second location; comparing the determined location of the fiducial with a reference fiducial location while the robot is moving the substrate from the first location towards the second location.
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