AM/FM measurements using multiple frequency of atomic force microscopy
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United States of America Patent
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Dec 12, 2017
Issued Date -
N/A
app pub date -
Sep 26, 2016
filing date -
Apr 23, 2014
priority date (Note) -
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Abstract
Apparatus and techniques presented combine the features and benefits of amplitude modulated (AM) atomic force microscopy (AFM), sometimes called AC mode AFM, with frequency modulated (FM) AFM. In AM-FM imaging, the topographic feedback from the first resonant drive frequency operates in AM mode while the phase feedback from second resonant drive frequency operates in FM mode. In particular the first or second frequency may be used to measure the loss tangent, a dimensionless parameter which measures the ratio of energy dissipated to energy stored in a cycle of deformation.
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International Classification(s)
- 2016 Application Filing Year
- G01Q Class
- 118 Applications Filed
- 104 Patents Issued To-Date
- 88.14 % Issued To-Date
Cited Art Landscape
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- 1 Citation Count
- G01Q Class
- 0 % this patent is cited more than
- 8 Age
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