Measurement device for linear stage
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United States of America Patent
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Dec 12, 2017
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app pub date -
Dec 30, 2016
filing date -
Dec 30, 2016
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Abstract
A measurement device for a linear stage includes a two-dimensional grating and a measurement unit respectively disposed on first and second moving stages of the linear stage. The measurement unit includes a light source, a two-dimensional sensor and a processor. The light source emits incident light to the two-dimensional grating so that the incident light is reflected thereby to result in reflection light. The two-dimensional sensor receives the reflection light and converts the same to a reflection signal. The processor receives the reflection signal and determines accordingly a first rotational angle, and first and second displacement components of a displacement of the first moving stage.
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