Surface roughness sensor apparatus and processing tool structure using the same
Number of patents in Portfolio can not be more than 2000
United States of America Patent
Stats
-
Dec 12, 2017
Issued Date -
N/A
app pub date -
Jan 13, 2016
filing date -
Feb 4, 2015
priority date (Note) -
In Force
status (Latency Note)
Importance
Abstract
The present disclosure relates to a surface roughness sensor apparatus. The surface roughness sensor apparatus includes: a rotatable rotation shaft; a piezoelectric sensor provided along a circumference of the rotation shaft, rotated by rotation of the rotation shaft, and configured to generate a sensing signal in response to a pressure applied by a surface of an object as being in direct contact with the surface of the object; and a signal transfer unit configured to transfer the sensing signal generated and transmitted by the piezoelectric sensor to the outside of the sensor apparatus, and the piezoelectric sensor may be rotated in a direction in which a relative movement between the piezoelectric sensor and the surface of the object is made at a contact point with the object to minimize damage to the surface of the object.
First Claim
Family
International Classification(s)
Cited Art Landscape
Patent Citation Ranking
Recipient Email Address
Recipient Email Address
Comment
Recipient Email Address
Add to Portfolio(s)
To add this patent to one, or more, of your portfolios, simply click the add button.
This Patent is in these Portfolios:
Add to additional portfolios:
Last Refreshed On:
Changes done successfully