Chlorosilane production method

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United States of America Patent

PATENT NO 9840421
APP PUB NO 20110236289A1
SERIAL NO

13132956

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Abstract

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When a disproportionated chlorosilane is to be produced by causing a starting material chlorosilane liquid to flow through a catalyst-packed layer which is packed with a weakly basic anion exchange resin as a disproportionation reaction catalyst to carry out a disproportionation reaction, before the disproportionation reaction is carried out, the disproportionation reaction catalyst is brought into contact with a processing gas obtained by diluting a chlorosilane with an inert gas to prevent the deterioration of the disproportionation reaction catalyst at the start of the reaction so as to carry out the disproportionation of the chlorosilane efficiently.

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Patent Owner(s)

Patent OwnerAddress
TOKUYAMA CORPORATIONYAMAGUCHI

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Iiyama, Shouji Shunan, JP 1 1
Koyanagi, Shinichirou Shunan, JP 2 12
Sakata, Kanji Shunan, JP 12 72
Takata, Yukihiro Shunan, JP 4 46
Yamamoto, Tomohiro Shunan, JP 84 2734

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