Surface chemical treatment apparatus for drawing predetermined pattern by carrying out a chemical treatment
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United States of America Patent
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Dec 12, 2017
Grant Date -
Dec 31, 2015
app pub date -
Feb 14, 2013
filing date -
Feb 14, 2013
priority date (Note) -
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Abstract
A surface chemical treatment apparatus provided with: a first conduit having an opening at one end and communicating with a liquid supply means at the other end; a second conduit having at one end an opening that surrounds the opening of the first conduit and communicating with a liquid suction means at the other end; and a moving mechanism for moving the openings of the first and second conduits relative to the solid phase surface, so as to make a surface chemical treatment possible in a fine pattern by allowing the patterning solution to be dispensed through the opening of the first conduit while allowing the solution to be suctioned up together with the surrounding liquid phase or gas phase medium through the opening of the second conduit that surrounds the opening of the first conduit and, thus, preventing seepage of the solution in all directions.
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