Wafer transport system
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United States of America Patent
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Dec 5, 2017
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N/A
app pub date -
Sep 17, 2012
filing date -
Sep 16, 2011
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Abstract
A transport system includes, in a first environment, a driving screw having threads with a thread pitch. In a second environment, a driven member has a magnetic coupling with a driven member pitch substantially corresponding to the thread pitch. The magnetic coupling is coupled to a portion of threads and rotation of the driving screw displaces the magnetic coupling with respect to the driving screw.
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