Molybdenum containing targets for touch screen device
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United States of America Patent
Stats
-
Dec 5, 2017
Issued Date -
N/A
app pub date -
Jul 30, 2015
filing date -
Jun 30, 2010
priority date (Note) -
In Force
status (Latency Note)
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Abstract
The invention is directed at sputter targets including 50 atomic % or more molybdenum, a second metal element of titanium, and a third metal element of chromium or tantalum, and deposited films prepared by the sputter targets. In a preferred aspect of the invention, the sputter target includes a phase that is rich in molybdenum, a phase that is rich in titanium, and a phase that is rich in the third metal element.
First Claim
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International Classification(s)
- H01J:ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- C23C:COATING METALLIC MATERIAL; COATING MATERIAL WITH M....
- C03C:CHEMICAL COMPOSITION OF GLASSES, GLAZES, OR VITREO....
- G06F:ELECTRIC DIGITAL DATA PROCESSING
- B22F:WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES F....
- C23G:CLEANING OR DE-GREASING OF METALLIC MATERIAL BY CH....
- C22C:ALLOYS
- 2015 Application Filing Year
- H01J Class
- 2290 Applications Filed
- 1843 Patents Issued To-Date
- 80.49 % Issued To-Date
Cited Art Landscape
Patent Citation Ranking
- 2 Citation Count
- H01J Class
- 25.25 % this patent is cited more than
- 8 Age
Maintenance Fees
| Fee | Large entity fee | small entity fee | micro entity fee | due date |
|---|---|---|---|---|
| 7.5 Year Payment | $3600.00 | $1800.00 | $900.00 | Jun 5, 2025 |
| 11.5 Year Payment | $7400.00 | $3700.00 | $1850.00 | Jun 5, 2029 |
