Micro stage for particle beam column using piezo elements as actuator
Number of patents in Portfolio can not be more than 2000
United States of America Patent
Stats
-
Dec 5, 2017
Issued Date -
N/A
app pub date -
Mar 13, 2015
filing date -
Mar 13, 2015
priority date (Note) -
In Force
status (Latency Note)
Importance
Abstract
Disclosed herein is a micro stage using a piezoelectric element that can be reliably operated even in a vacuum environment. In a particle column requiring a high precision, for example, a microelectronic column, the micro stage can be used as a stage with micro or nano degree precision for alignment of parts of the column, or for moving a sample, and so on.
First Claim
Family
International Classification(s)
- [Classification Symbol]
- [Patents Count]
Cited Art Landscape
Patent Citation Ranking
Recipient Email Address
Recipient Email Address
Comment
Recipient Email Address
Add to Portfolio(s)
To add this patent to one, or more, of your portfolios, simply click the add button.
This Patent is in these Portfolios:
Add to additional portfolios:
Last Refreshed On:
Changes done successfully