Gray-tone masks and the manufacturing method thereof
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United States of America Patent
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Dec 5, 2017
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N/A
app pub date -
Jun 30, 2015
filing date -
Apr 10, 2015
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Abstract
The present disclosure relates to a gray-tone mask (GTM) and the manufacturing method thereof. The GTM includes at least one first light-blocking bar and at least on second light-blocking bar. A first gap is formed between any two adjacent first light-blocking bars. The second light-blocking bar is arranged within the first gap. The first gap includes a first crack being formed between adjacent first light-blocking bar and second light-blocking bar, wherein a length of the second light-blocking bar is “a”, a width of the first crack is “b”, and a ratio of the length of the second light-blocking bar (“a”) to the width of the first crack (“b”) satisfy the relationship: 0.9
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