Optical cantilever based analysis

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United States of America Patent

PATENT NO 9835591
SERIAL NO

14473807

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Abstract

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An optical sensor including a MEMS structure, and a grating coupled resonating structure positioned adjacent to the MEMS structure, the grating coupled resonating structure comprising an interrogating grating coupler configured to direct light towards the MEMS structure. The interrogating grating coupler is two dimensional, and the interrogating grating coupler and the MEMS structure form an optical resonant cavity.

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Patent Owner(s)

Patent OwnerAddress
THE UNIVERSITY OF WESTERN AUSTRALIA35 STIRLING HIGHWAY NEDLANDS WESTERN AUSTRALIA 6009 AUSTRALIA

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Dell, John Marcel Bull Creek, AU 9 62
Faraone, Lorenzo Mt. Lawley, AU 20 324
Jeffery, Roger Balcatta, AU 4 14
Keating, Adrian John Mt. Hawthorn, AU 6 21
Martyniuk, Mariusz Wattle Grove, AU 8 24
Putrino, Gino Michael Dianella, AU 6 21
Silva, Dilusha Ballajura, AU 6 17

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