Evaluation system and a method for evaluating a substrate
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United States of America Patent
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Dec 5, 2017
Grant Date -
Mar 17, 2016
app pub date -
Nov 19, 2015
filing date -
May 23, 2013
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Abstract
There may be provided an evaluation system that may include spatial sensors that include atomic force microscopes (AFMs) and a solid immersion lens. The AFMs are arranged to generate spatial relationship information that is indicative of a spatial relationship between the solid immersion lens and a substrate. The controller is arranged to receive the spatial relationship information and to send correction signals to the at least one location correction element for introducing a desired spatial relationship between the solid immersion lens and the substrate.
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