Sensor module for measuring a pressure of a fluid with at least one electronic circuit, particularly an integrated circuit, arranged on a circuit carrier, and at least one pressure measuring chip
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United States of America Patent
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Dec 5, 2017
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N/A
app pub date -
Sep 30, 2015
filing date -
Sep 30, 2014
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Abstract
In a sensor module for measuring a pressure of a fluid, having at least one supporting element, at least one electronic circuit, particularly an integrated circuit, arranged on at least one circuit carrier, and with at least one pressure measuring chip that has at least one pressure measuring membrane, wherein at least sections of the circuit carrier are surrounded by a protective material to protect it from surrounding fluids, it is provided as essential to the invention that the pressure measuring chip and the circuit carrier are arranged vertically one underneath the other, and that the pressure measuring chip is at least partially mechanically decoupled from the supporting element.
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