Support device for a plurality of wafers for a vertical oven
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United States of America Patent
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Dec 5, 2017
Grant Date -
Jul 30, 2015
app pub date -
Aug 20, 2013
filing date -
Sep 10, 2012
priority date (Note) -
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Abstract
A support device that has a central axis and includes three uprights extending substantially parallel to the central axis, a plurality of series of support members spaced along the central axis, each series of support members comprising three support members adapted to support one wafer of the plurality of wafers and extending in different essentially longitudinal directions transverse to the central axis, each support member being mounted directly on a separate upright, this support device being remarkable in that the directions of the three support members of each series of support members are concurrent at a point on the central axis.
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