Microfluidic devices for the generation of nano-vapor bubbles and their methods of manufacture and use
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United States of America Patent
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Dec 5, 2017
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Jul 21, 2016
app pub date -
Aug 19, 2015
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Aug 1, 2012
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Abstract
Microfluidic devices having superhydrophilic bi-porous interfaces are provided, along with their methods of formation. The device can include a substrate defining a microchannel formed between a pair of side walls and a bottom surface and a plurality of nanowires extending from each of the side walls and the bottom surface. For example, the nanowires can be silicon nanowires (e.g., pure silicon, silicon oxide, silicon carbide, etc., or mixtures thereof).
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