System for reclaiming, rebalancing and recirculating laser gas mixtures used in a high energy laser system
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United States of America Patent
Stats
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Nov 28, 2017
Grant Date -
Mar 2, 2017
app pub date -
Aug 23, 2016
filing date -
Aug 24, 2015
priority date (Note) -
In Force
status (Latency Note)
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Abstract
The present invention relates to a system for recirculating the gas atmosphere within an excimer laser system, where contaminates, created in the laser's operation, are removed, and the gas concentrations of additive gases, such as Xe, Kr, or others, depleted in the laser operation, are rebalanced to specific lasing mixtures by analyzation and component replenishment from one or more external supplies.
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International Classification(s)
- 2016 Application Filing Year
- H01S Class
- 1245 Applications Filed
- 1023 Patents Issued To-Date
- 82.17 % Issued To-Date
Cited Art Landscape
Patent Citation Ranking
- 2 Citation Count
- H01S Class
- 21.26 % this patent is cited more than
- 8 Age
Maintenance Fees
| Fee | Large entity fee | small entity fee | micro entity fee | due date |
|---|---|---|---|---|
| 7.5 Year Payment | $3600.00 | $1800.00 | $900.00 | May 28, 2025 |
| 11.5 Year Payment | $7400.00 | $3700.00 | $1850.00 | May 28, 2029 |
